JPS5221471B2 - - Google Patents

Info

Publication number
JPS5221471B2
JPS5221471B2 JP8269971A JP8269971A JPS5221471B2 JP S5221471 B2 JPS5221471 B2 JP S5221471B2 JP 8269971 A JP8269971 A JP 8269971A JP 8269971 A JP8269971 A JP 8269971A JP S5221471 B2 JPS5221471 B2 JP S5221471B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8269971A
Other languages
Japanese (ja)
Other versions
JPS4846574A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8269971A priority Critical patent/JPS5221471B2/ja
Publication of JPS4846574A publication Critical patent/JPS4846574A/ja
Publication of JPS5221471B2 publication Critical patent/JPS5221471B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8269971A 1971-10-18 1971-10-18 Expired JPS5221471B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8269971A JPS5221471B2 (enrdf_load_stackoverflow) 1971-10-18 1971-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8269971A JPS5221471B2 (enrdf_load_stackoverflow) 1971-10-18 1971-10-18

Publications (2)

Publication Number Publication Date
JPS4846574A JPS4846574A (enrdf_load_stackoverflow) 1973-07-03
JPS5221471B2 true JPS5221471B2 (enrdf_load_stackoverflow) 1977-06-10

Family

ID=13781642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8269971A Expired JPS5221471B2 (enrdf_load_stackoverflow) 1971-10-18 1971-10-18

Country Status (1)

Country Link
JP (1) JPS5221471B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112389A (ja) * 1974-07-20 1976-01-30 Kagaku Gijutsucho Mukizai Fujutaiikitanketsushoikuseihoniokeru ketsushokeijidoseigyosochi
JPS5117187A (enrdf_load_stackoverflow) * 1974-08-02 1976-02-10 Sumitomo Electric Industries
JPH0751476B2 (ja) * 1986-06-23 1995-06-05 三菱マテリアル株式会社 単結晶引き上げ装置の群管理システム
JPH0755878B2 (ja) * 1988-06-09 1995-06-14 国際電気株式会社 半導体単結晶の直径制御方法

Also Published As

Publication number Publication date
JPS4846574A (enrdf_load_stackoverflow) 1973-07-03

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