JPS522104B2 - - Google Patents

Info

Publication number
JPS522104B2
JPS522104B2 JP46063160A JP6316071A JPS522104B2 JP S522104 B2 JPS522104 B2 JP S522104B2 JP 46063160 A JP46063160 A JP 46063160A JP 6316071 A JP6316071 A JP 6316071A JP S522104 B2 JPS522104 B2 JP S522104B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46063160A
Other languages
Japanese (ja)
Other versions
JPS4828953A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46063160A priority Critical patent/JPS522104B2/ja
Publication of JPS4828953A publication Critical patent/JPS4828953A/ja
Publication of JPS522104B2 publication Critical patent/JPS522104B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)
  • Thermistors And Varistors (AREA)
JP46063160A 1971-08-19 1971-08-19 Expired JPS522104B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46063160A JPS522104B2 (cs) 1971-08-19 1971-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46063160A JPS522104B2 (cs) 1971-08-19 1971-08-19

Publications (2)

Publication Number Publication Date
JPS4828953A JPS4828953A (cs) 1973-04-17
JPS522104B2 true JPS522104B2 (cs) 1977-01-19

Family

ID=13221194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46063160A Expired JPS522104B2 (cs) 1971-08-19 1971-08-19

Country Status (1)

Country Link
JP (1) JPS522104B2 (cs)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519041B2 (cs) * 1972-07-20 1980-05-23
JPS5426710B2 (cs) * 1972-11-17 1979-09-05
JPS5149495A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS5149463A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS5149461A (ja) * 1974-10-26 1976-04-28 Meidensha Electric Mfg Co Ltd Hichokusenteikotai
JPS51146342U (cs) * 1975-05-19 1976-11-24
JPS58158437U (ja) * 1982-04-16 1983-10-22 昭和電工株式会社 ウエハ−容器
JPS60101949A (ja) * 1983-11-08 1985-06-06 Matsushita Electric Ind Co Ltd 半導体結晶板へき開装置
EP1748481B1 (en) 2004-05-19 2015-04-22 Nippon Mining & Metals Co., Ltd. Wafer storage container

Also Published As

Publication number Publication date
JPS4828953A (cs) 1973-04-17

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