JPS5220521Y2 - - Google Patents
Info
- Publication number
- JPS5220521Y2 JPS5220521Y2 JP2033272U JP2033272U JPS5220521Y2 JP S5220521 Y2 JPS5220521 Y2 JP S5220521Y2 JP 2033272 U JP2033272 U JP 2033272U JP 2033272 U JP2033272 U JP 2033272U JP S5220521 Y2 JPS5220521 Y2 JP S5220521Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2033272U JPS5220521Y2 (ja) | 1972-02-21 | 1972-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2033272U JPS5220521Y2 (ja) | 1972-02-21 | 1972-02-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4896236U JPS4896236U (ja) | 1973-11-15 |
| JPS5220521Y2 true JPS5220521Y2 (ja) | 1977-05-12 |
Family
ID=27873801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2033272U Expired JPS5220521Y2 (ja) | 1972-02-21 | 1972-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5220521Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0329319Y2 (ja) * | 1984-09-21 | 1991-06-21 |
-
1972
- 1972-02-21 JP JP2033272U patent/JPS5220521Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4896236U (ja) | 1973-11-15 |