JPS5220521Y2 - - Google Patents

Info

Publication number
JPS5220521Y2
JPS5220521Y2 JP2033272U JP2033272U JPS5220521Y2 JP S5220521 Y2 JPS5220521 Y2 JP S5220521Y2 JP 2033272 U JP2033272 U JP 2033272U JP 2033272 U JP2033272 U JP 2033272U JP S5220521 Y2 JPS5220521 Y2 JP S5220521Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2033272U
Other languages
Japanese (ja)
Other versions
JPS4896236U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2033272U priority Critical patent/JPS5220521Y2/ja
Publication of JPS4896236U publication Critical patent/JPS4896236U/ja
Application granted granted Critical
Publication of JPS5220521Y2 publication Critical patent/JPS5220521Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2033272U 1972-02-21 1972-02-21 Expired JPS5220521Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2033272U JPS5220521Y2 (cg-RX-API-DMAC7.html) 1972-02-21 1972-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2033272U JPS5220521Y2 (cg-RX-API-DMAC7.html) 1972-02-21 1972-02-21

Publications (2)

Publication Number Publication Date
JPS4896236U JPS4896236U (cg-RX-API-DMAC7.html) 1973-11-15
JPS5220521Y2 true JPS5220521Y2 (cg-RX-API-DMAC7.html) 1977-05-12

Family

ID=27873801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2033272U Expired JPS5220521Y2 (cg-RX-API-DMAC7.html) 1972-02-21 1972-02-21

Country Status (1)

Country Link
JP (1) JPS5220521Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0329319Y2 (cg-RX-API-DMAC7.html) * 1984-09-21 1991-06-21

Also Published As

Publication number Publication date
JPS4896236U (cg-RX-API-DMAC7.html) 1973-11-15

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