JPS5218958B2 - - Google Patents

Info

Publication number
JPS5218958B2
JPS5218958B2 JP48046324A JP4632473A JPS5218958B2 JP S5218958 B2 JPS5218958 B2 JP S5218958B2 JP 48046324 A JP48046324 A JP 48046324A JP 4632473 A JP4632473 A JP 4632473A JP S5218958 B2 JPS5218958 B2 JP S5218958B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48046324A
Other languages
Japanese (ja)
Other versions
JPS4954999A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4954999A publication Critical patent/JPS4954999A/ja
Publication of JPS5218958B2 publication Critical patent/JPS5218958B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/872—Magnetic field shield
JP48046324A 1972-04-25 1973-04-25 Expired JPS5218958B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR727214639A FR2181467B1 (en) 1972-04-25 1972-04-25

Publications (2)

Publication Number Publication Date
JPS4954999A JPS4954999A (en) 1974-05-28
JPS5218958B2 true JPS5218958B2 (en) 1977-05-25

Family

ID=9097484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48046324A Expired JPS5218958B2 (en) 1972-04-25 1973-04-25

Country Status (5)

Country Link
US (1) US3864597A (en)
JP (1) JPS5218958B2 (en)
DE (1) DE2320888C3 (en)
FR (1) FR2181467B1 (en)
GB (1) GB1396209A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068692U (en) * 1983-10-14 1985-05-15 横河電機株式会社 Circuit unit storage mechanism

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5186357A (en) * 1975-01-27 1976-07-28 Nippon Electron Optics Lab DENSHISENICHISETSUTEIHOHOOYOBISOREOJITSUSHISERUSOCHI
NL182924C (en) * 1978-05-12 1988-06-01 Philips Nv DEVICE FOR IMPLANTING IONS IN A TIPPLATE.
DE2831602A1 (en) * 1978-07-19 1980-02-07 Leybold Heraeus Gmbh & Co Kg DEVICE FOR DETECTING RADIATION PARAMETERS OF A FOCUSED CARGO BEAM BEAM PERIODICALLY DRIVED ON A TARGET AREA AND MEASURING METHOD USING THE DEVICE
JPS5548949A (en) * 1978-10-02 1980-04-08 Jones Geraint A C Scribing device and method
US4243866A (en) * 1979-01-11 1981-01-06 International Business Machines Corporation Method and apparatus for forming a variable size electron beam
JPS5621321A (en) * 1979-07-27 1981-02-27 Fujitsu Ltd Automatically setting method of focus and exposure coefficient of electron beam exposure apparatus
JPS5633830A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Detecting method for mark positioning by electron beam
JPS60201626A (en) * 1984-03-27 1985-10-12 Canon Inc Alignment equipment
US4677296A (en) * 1984-09-24 1987-06-30 Siemens Aktiengesellschaft Apparatus and method for measuring lengths in a scanning particle microscope
US4721842A (en) * 1986-08-29 1988-01-26 Ferranti Sciaky, Inc. Beam position correction device
US5786601A (en) * 1994-06-28 1998-07-28 Leica Lithography Systems Ltd. Electron beam lithography machine

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1171461A (en) * 1965-09-23 1969-11-19 Ass Elect Ind Improvements relating to the Focussing of Microscopes
US3547074A (en) * 1967-04-13 1970-12-15 Block Engineering Apparatus for forming microelements
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3699304A (en) * 1969-12-15 1972-10-17 Ibm Electron beam deflection control method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068692U (en) * 1983-10-14 1985-05-15 横河電機株式会社 Circuit unit storage mechanism

Also Published As

Publication number Publication date
FR2181467B1 (en) 1974-07-26
GB1396209A (en) 1975-06-04
DE2320888A1 (en) 1973-11-08
DE2320888B2 (en) 1979-02-22
FR2181467A1 (en) 1973-12-07
US3864597A (en) 1975-02-04
JPS4954999A (en) 1974-05-28
DE2320888C3 (en) 1979-10-25

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