JPS5218665U - - Google Patents

Info

Publication number
JPS5218665U
JPS5218665U JP10405075U JP10405075U JPS5218665U JP S5218665 U JPS5218665 U JP S5218665U JP 10405075 U JP10405075 U JP 10405075U JP 10405075 U JP10405075 U JP 10405075U JP S5218665 U JPS5218665 U JP S5218665U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10405075U
Other languages
Japanese (ja)
Other versions
JPS5549183Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10405075U priority Critical patent/JPS5549183Y2/ja
Publication of JPS5218665U publication Critical patent/JPS5218665U/ja
Application granted granted Critical
Publication of JPS5549183Y2 publication Critical patent/JPS5549183Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
  • Ventilation (AREA)
JP10405075U 1975-07-25 1975-07-25 Expired JPS5549183Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10405075U JPS5549183Y2 (enrdf_load_stackoverflow) 1975-07-25 1975-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10405075U JPS5549183Y2 (enrdf_load_stackoverflow) 1975-07-25 1975-07-25

Publications (2)

Publication Number Publication Date
JPS5218665U true JPS5218665U (enrdf_load_stackoverflow) 1977-02-09
JPS5549183Y2 JPS5549183Y2 (enrdf_load_stackoverflow) 1980-11-17

Family

ID=28585419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10405075U Expired JPS5549183Y2 (enrdf_load_stackoverflow) 1975-07-25 1975-07-25

Country Status (1)

Country Link
JP (1) JPS5549183Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197555A (ja) * 1984-10-19 1986-05-16 Tokyo Optical Co Ltd 表面検査装置
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197555A (ja) * 1984-10-19 1986-05-16 Tokyo Optical Co Ltd 表面検査装置
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer

Also Published As

Publication number Publication date
JPS5549183Y2 (enrdf_load_stackoverflow) 1980-11-17

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