JPS5218576B2 - - Google Patents

Info

Publication number
JPS5218576B2
JPS5218576B2 JP49042932A JP4293274A JPS5218576B2 JP S5218576 B2 JPS5218576 B2 JP S5218576B2 JP 49042932 A JP49042932 A JP 49042932A JP 4293274 A JP4293274 A JP 4293274A JP S5218576 B2 JPS5218576 B2 JP S5218576B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49042932A
Other languages
Japanese (ja)
Other versions
JPS50137122A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49042932A priority Critical patent/JPS5218576B2/ja
Publication of JPS50137122A publication Critical patent/JPS50137122A/ja
Publication of JPS5218576B2 publication Critical patent/JPS5218576B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP49042932A 1974-04-17 1974-04-17 Expired JPS5218576B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49042932A JPS5218576B2 (https=) 1974-04-17 1974-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49042932A JPS5218576B2 (https=) 1974-04-17 1974-04-17

Publications (2)

Publication Number Publication Date
JPS50137122A JPS50137122A (https=) 1975-10-31
JPS5218576B2 true JPS5218576B2 (https=) 1977-05-23

Family

ID=12649776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49042932A Expired JPS5218576B2 (https=) 1974-04-17 1974-04-17

Country Status (1)

Country Link
JP (1) JPS5218576B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466450U (https=) * 1977-10-19 1979-05-11

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6679044B2 (ja) * 2016-05-24 2020-04-15 新日本無線株式会社 Mems素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466450U (https=) * 1977-10-19 1979-05-11

Also Published As

Publication number Publication date
JPS50137122A (https=) 1975-10-31

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