JPS5217385A - Ozonizer with oxygen recycle system - Google Patents

Ozonizer with oxygen recycle system

Info

Publication number
JPS5217385A
JPS5217385A JP9431975A JP9431975A JPS5217385A JP S5217385 A JPS5217385 A JP S5217385A JP 9431975 A JP9431975 A JP 9431975A JP 9431975 A JP9431975 A JP 9431975A JP S5217385 A JPS5217385 A JP S5217385A
Authority
JP
Japan
Prior art keywords
ozonizer
recycle system
oxygen recycle
oxygen
desorption gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9431975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5328394B2 (enrdf_load_stackoverflow
Inventor
Shigenori Yagi
Norikazu Tabata
Shuji Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9431975A priority Critical patent/JPS5217385A/ja
Publication of JPS5217385A publication Critical patent/JPS5217385A/ja
Publication of JPS5328394B2 publication Critical patent/JPS5328394B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP9431975A 1975-08-01 1975-08-01 Ozonizer with oxygen recycle system Granted JPS5217385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9431975A JPS5217385A (en) 1975-08-01 1975-08-01 Ozonizer with oxygen recycle system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9431975A JPS5217385A (en) 1975-08-01 1975-08-01 Ozonizer with oxygen recycle system

Publications (2)

Publication Number Publication Date
JPS5217385A true JPS5217385A (en) 1977-02-09
JPS5328394B2 JPS5328394B2 (enrdf_load_stackoverflow) 1978-08-14

Family

ID=14106945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9431975A Granted JPS5217385A (en) 1975-08-01 1975-08-01 Ozonizer with oxygen recycle system

Country Status (1)

Country Link
JP (1) JPS5217385A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235788A (en) * 1975-09-17 1977-03-18 Mitsubishi Electric Corp Apparatus for producing ozone by cycling oxygen
JPS555541A (en) * 1978-06-27 1980-01-16 Nec Corp Integrated circuit for microwave
JPS57188406A (en) * 1981-05-12 1982-11-19 Mitsubishi Electric Corp Intermittently feeding apparatus for ozone
US5039314A (en) * 1989-06-26 1991-08-13 Voest-Alpine Industrienlagenbau Gesellschaft M.B.H. Method for producing oxygen and/or ozone

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4545481B2 (ja) * 2004-04-28 2010-09-15 三菱電機株式会社 オゾン供給装置
JP5189033B2 (ja) * 2009-06-17 2013-04-24 三菱電機株式会社 オゾン供給方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952447A (enrdf_load_stackoverflow) * 1972-09-22 1974-05-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952447A (enrdf_load_stackoverflow) * 1972-09-22 1974-05-21

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235788A (en) * 1975-09-17 1977-03-18 Mitsubishi Electric Corp Apparatus for producing ozone by cycling oxygen
JPS555541A (en) * 1978-06-27 1980-01-16 Nec Corp Integrated circuit for microwave
JPS57188406A (en) * 1981-05-12 1982-11-19 Mitsubishi Electric Corp Intermittently feeding apparatus for ozone
US5039314A (en) * 1989-06-26 1991-08-13 Voest-Alpine Industrienlagenbau Gesellschaft M.B.H. Method for producing oxygen and/or ozone

Also Published As

Publication number Publication date
JPS5328394B2 (enrdf_load_stackoverflow) 1978-08-14

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