JPS5216875A - Splash prevnter for rotational dryer - Google Patents

Splash prevnter for rotational dryer

Info

Publication number
JPS5216875A
JPS5216875A JP9188375A JP9188375A JPS5216875A JP S5216875 A JPS5216875 A JP S5216875A JP 9188375 A JP9188375 A JP 9188375A JP 9188375 A JP9188375 A JP 9188375A JP S5216875 A JPS5216875 A JP S5216875A
Authority
JP
Japan
Prior art keywords
splash
prevnter
dryer
rotational
rotational dryer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9188375A
Other languages
English (en)
Inventor
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9188375A priority Critical patent/JPS5216875A/ja
Publication of JPS5216875A publication Critical patent/JPS5216875A/ja
Pending legal-status Critical Current

Links

JP9188375A 1975-07-30 1975-07-30 Splash prevnter for rotational dryer Pending JPS5216875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9188375A JPS5216875A (en) 1975-07-30 1975-07-30 Splash prevnter for rotational dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9188375A JPS5216875A (en) 1975-07-30 1975-07-30 Splash prevnter for rotational dryer

Publications (1)

Publication Number Publication Date
JPS5216875A true JPS5216875A (en) 1977-02-08

Family

ID=14038949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9188375A Pending JPS5216875A (en) 1975-07-30 1975-07-30 Splash prevnter for rotational dryer

Country Status (1)

Country Link
JP (1) JPS5216875A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605530A (ja) * 1984-04-25 1985-01-12 Hitachi Ltd 半導体ウエハ洗浄装置
US4517752A (en) * 1983-06-27 1985-05-21 Machine Technology, Inc. Splash retarder
JPH02284648A (ja) * 1989-04-27 1990-11-22 Mitsubishi Heavy Ind Ltd 活性化オゾン脱臭触媒の製造方法
JPH0577264U (ja) * 1992-03-26 1993-10-22 株式会社アルメックス 液切処理槽
JPH0734974U (ja) * 1993-12-02 1995-06-27 株式会社京浜精機製作所 高圧湯洗浄装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918614U (ja) * 1972-05-20 1974-02-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918614U (ja) * 1972-05-20 1974-02-16

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4517752A (en) * 1983-06-27 1985-05-21 Machine Technology, Inc. Splash retarder
JPS605530A (ja) * 1984-04-25 1985-01-12 Hitachi Ltd 半導体ウエハ洗浄装置
JPH0347574B2 (ja) * 1984-04-25 1991-07-19 Hitachi Ltd
JPH02284648A (ja) * 1989-04-27 1990-11-22 Mitsubishi Heavy Ind Ltd 活性化オゾン脱臭触媒の製造方法
JPH0577264U (ja) * 1992-03-26 1993-10-22 株式会社アルメックス 液切処理槽
JPH0734974U (ja) * 1993-12-02 1995-06-27 株式会社京浜精機製作所 高圧湯洗浄装置

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