JPS5216160A - Electron beam detection device - Google Patents

Electron beam detection device

Info

Publication number
JPS5216160A
JPS5216160A JP50091911A JP9191175A JPS5216160A JP S5216160 A JPS5216160 A JP S5216160A JP 50091911 A JP50091911 A JP 50091911A JP 9191175 A JP9191175 A JP 9191175A JP S5216160 A JPS5216160 A JP S5216160A
Authority
JP
Japan
Prior art keywords
electron beam
detection device
beam detection
elementnary
simplify
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50091911A
Other languages
English (en)
Japanese (ja)
Other versions
JPS563624B2 (enExample
Inventor
Sadao Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50091911A priority Critical patent/JPS5216160A/ja
Publication of JPS5216160A publication Critical patent/JPS5216160A/ja
Publication of JPS563624B2 publication Critical patent/JPS563624B2/ja
Granted legal-status Critical Current

Links

JP50091911A 1975-07-30 1975-07-30 Electron beam detection device Granted JPS5216160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091911A JPS5216160A (en) 1975-07-30 1975-07-30 Electron beam detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091911A JPS5216160A (en) 1975-07-30 1975-07-30 Electron beam detection device

Publications (2)

Publication Number Publication Date
JPS5216160A true JPS5216160A (en) 1977-02-07
JPS563624B2 JPS563624B2 (enExample) 1981-01-26

Family

ID=14039751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091911A Granted JPS5216160A (en) 1975-07-30 1975-07-30 Electron beam detection device

Country Status (1)

Country Link
JP (1) JPS5216160A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034158A (enExample) * 1973-07-27 1975-04-02
JPS50118659A (enExample) * 1974-03-01 1975-09-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034158A (enExample) * 1973-07-27 1975-04-02
JPS50118659A (enExample) * 1974-03-01 1975-09-17

Also Published As

Publication number Publication date
JPS563624B2 (enExample) 1981-01-26

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