JPS52158908U - - Google Patents
Info
- Publication number
- JPS52158908U JPS52158908U JP6764676U JP6764676U JPS52158908U JP S52158908 U JPS52158908 U JP S52158908U JP 6764676 U JP6764676 U JP 6764676U JP 6764676 U JP6764676 U JP 6764676U JP S52158908 U JPS52158908 U JP S52158908U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6764676U JPS52158908U (enEXAMPLES) | 1976-05-28 | 1976-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6764676U JPS52158908U (enEXAMPLES) | 1976-05-28 | 1976-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52158908U true JPS52158908U (enEXAMPLES) | 1977-12-02 |
Family
ID=28534600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6764676U Pending JPS52158908U (enEXAMPLES) | 1976-05-28 | 1976-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52158908U (enEXAMPLES) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009063890A1 (ja) * | 2007-11-14 | 2009-05-22 | Ulvac, Inc. | 多段式ドライポンプ |
-
1976
- 1976-05-28 JP JP6764676U patent/JPS52158908U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009063890A1 (ja) * | 2007-11-14 | 2009-05-22 | Ulvac, Inc. | 多段式ドライポンプ |
| JP5073754B2 (ja) * | 2007-11-14 | 2012-11-14 | 株式会社アルバック | 多段式ドライポンプ |
| CN101855454B (zh) | 2007-11-14 | 2012-12-05 | 株式会社爱发科 | 多级干泵 |