JPS52155061A - Device for high pressure oxidation diffusion for semiconductor - Google Patents

Device for high pressure oxidation diffusion for semiconductor

Info

Publication number
JPS52155061A
JPS52155061A JP9228476A JP9228476A JPS52155061A JP S52155061 A JPS52155061 A JP S52155061A JP 9228476 A JP9228476 A JP 9228476A JP 9228476 A JP9228476 A JP 9228476A JP S52155061 A JPS52155061 A JP S52155061A
Authority
JP
Japan
Prior art keywords
semiconductor
high pressure
pressure oxidation
oxidation diffusion
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9228476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5433955B2 (enExample
Inventor
Riyouzou Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP9228476A priority Critical patent/JPS52155061A/ja
Publication of JPS52155061A publication Critical patent/JPS52155061A/ja
Publication of JPS5433955B2 publication Critical patent/JPS5433955B2/ja
Granted legal-status Critical Current

Links

JP9228476A 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor Granted JPS52155061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9228476A JPS52155061A (en) 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9228476A JPS52155061A (en) 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor

Publications (2)

Publication Number Publication Date
JPS52155061A true JPS52155061A (en) 1977-12-23
JPS5433955B2 JPS5433955B2 (enExample) 1979-10-24

Family

ID=14050096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9228476A Granted JPS52155061A (en) 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor

Country Status (1)

Country Link
JP (1) JPS52155061A (enExample)

Also Published As

Publication number Publication date
JPS5433955B2 (enExample) 1979-10-24

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