JPS52155060A - Device for high presure oxidation diffusion for semiconductor - Google Patents

Device for high presure oxidation diffusion for semiconductor

Info

Publication number
JPS52155060A
JPS52155060A JP9228376A JP9228376A JPS52155060A JP S52155060 A JPS52155060 A JP S52155060A JP 9228376 A JP9228376 A JP 9228376A JP 9228376 A JP9228376 A JP 9228376A JP S52155060 A JPS52155060 A JP S52155060A
Authority
JP
Japan
Prior art keywords
semiconductor
oxidation diffusion
high presure
presure
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9228376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5435068B2 (enrdf_load_stackoverflow
Inventor
Riyouzou Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP9228376A priority Critical patent/JPS52155060A/ja
Publication of JPS52155060A publication Critical patent/JPS52155060A/ja
Publication of JPS5435068B2 publication Critical patent/JPS5435068B2/ja
Granted legal-status Critical Current

Links

JP9228376A 1976-08-04 1976-08-04 Device for high presure oxidation diffusion for semiconductor Granted JPS52155060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9228376A JPS52155060A (en) 1976-08-04 1976-08-04 Device for high presure oxidation diffusion for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9228376A JPS52155060A (en) 1976-08-04 1976-08-04 Device for high presure oxidation diffusion for semiconductor

Publications (2)

Publication Number Publication Date
JPS52155060A true JPS52155060A (en) 1977-12-23
JPS5435068B2 JPS5435068B2 (enrdf_load_stackoverflow) 1979-10-31

Family

ID=14050065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9228376A Granted JPS52155060A (en) 1976-08-04 1976-08-04 Device for high presure oxidation diffusion for semiconductor

Country Status (1)

Country Link
JP (1) JPS52155060A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5435068B2 (enrdf_load_stackoverflow) 1979-10-31

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