JPS52153474A - Mass flow meter - Google Patents

Mass flow meter

Info

Publication number
JPS52153474A
JPS52153474A JP7018476A JP7018476A JPS52153474A JP S52153474 A JPS52153474 A JP S52153474A JP 7018476 A JP7018476 A JP 7018476A JP 7018476 A JP7018476 A JP 7018476A JP S52153474 A JPS52153474 A JP S52153474A
Authority
JP
Japan
Prior art keywords
mass flow
flow meter
midportions
measurement
sets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7018476A
Other languages
Japanese (ja)
Other versions
JPS5741685B2 (en
Inventor
Kyoichi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP7018476A priority Critical patent/JPS52153474A/en
Publication of JPS52153474A publication Critical patent/JPS52153474A/en
Publication of JPS5741685B2 publication Critical patent/JPS5741685B2/ja
Granted legal-status Critical Current

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  • Measuring Volume Flow (AREA)

Abstract

PURPOSE: Measurement of slight mass flow rates at high sensitivity is made possible by connecting the input and output ends of a fine tube in which fluid flows and a part of the midportions thereof to a common heat sink thereby forming two sets of electrically closed circuits.
COPYRIGHT: (C)1977,JPO&Japio
JP7018476A 1976-06-15 1976-06-15 Mass flow meter Granted JPS52153474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7018476A JPS52153474A (en) 1976-06-15 1976-06-15 Mass flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7018476A JPS52153474A (en) 1976-06-15 1976-06-15 Mass flow meter

Publications (2)

Publication Number Publication Date
JPS52153474A true JPS52153474A (en) 1977-12-20
JPS5741685B2 JPS5741685B2 (en) 1982-09-04

Family

ID=13424174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7018476A Granted JPS52153474A (en) 1976-06-15 1976-06-15 Mass flow meter

Country Status (1)

Country Link
JP (1) JPS52153474A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011510298A (en) * 2008-01-18 2011-03-31 ウオーターズ・テクノロジーズ・コーポレイシヨン Thermal loop flow sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011510298A (en) * 2008-01-18 2011-03-31 ウオーターズ・テクノロジーズ・コーポレイシヨン Thermal loop flow sensor

Also Published As

Publication number Publication date
JPS5741685B2 (en) 1982-09-04

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