JPS5215322A - Automatic focusing device - Google Patents

Automatic focusing device

Info

Publication number
JPS5215322A
JPS5215322A JP50090247A JP9024775A JPS5215322A JP S5215322 A JPS5215322 A JP S5215322A JP 50090247 A JP50090247 A JP 50090247A JP 9024775 A JP9024775 A JP 9024775A JP S5215322 A JPS5215322 A JP S5215322A
Authority
JP
Japan
Prior art keywords
automatic focusing
focusing device
examined
objective lens
plate substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50090247A
Other languages
English (en)
Other versions
JPS5932763B2 (ja
Inventor
Kiyoshi Nakagawa
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50090247A priority Critical patent/JPS5932763B2/ja
Publication of JPS5215322A publication Critical patent/JPS5215322A/ja
Publication of JPS5932763B2 publication Critical patent/JPS5932763B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50090247A 1975-07-25 1975-07-25 自動焦点合わせ装置 Expired JPS5932763B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50090247A JPS5932763B2 (ja) 1975-07-25 1975-07-25 自動焦点合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50090247A JPS5932763B2 (ja) 1975-07-25 1975-07-25 自動焦点合わせ装置

Publications (2)

Publication Number Publication Date
JPS5215322A true JPS5215322A (en) 1977-02-04
JPS5932763B2 JPS5932763B2 (ja) 1984-08-10

Family

ID=13993161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50090247A Expired JPS5932763B2 (ja) 1975-07-25 1975-07-25 自動焦点合わせ装置

Country Status (1)

Country Link
JP (1) JPS5932763B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816531A (ja) * 1979-05-11 1983-01-31 アメリカン、セミコンダクター、イクイップメント、テクノロジーズ 半導体ウエハ露光装置の位置決め装置
JPH03220714A (ja) * 1990-01-26 1991-09-27 Hitachi Ltd 投影露光装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816531A (ja) * 1979-05-11 1983-01-31 アメリカン、セミコンダクター、イクイップメント、テクノロジーズ 半導体ウエハ露光装置の位置決め装置
JPH0310221B2 (ja) * 1979-05-11 1991-02-13 Amerikan Semikondakutaa Ikuitsupumento Tekunorojiizu
JPH03220714A (ja) * 1990-01-26 1991-09-27 Hitachi Ltd 投影露光装置

Also Published As

Publication number Publication date
JPS5932763B2 (ja) 1984-08-10

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