JPS5214992B2 - - Google Patents
Info
- Publication number
- JPS5214992B2 JPS5214992B2 JP747972A JP747972A JPS5214992B2 JP S5214992 B2 JPS5214992 B2 JP S5214992B2 JP 747972 A JP747972 A JP 747972A JP 747972 A JP747972 A JP 747972A JP S5214992 B2 JPS5214992 B2 JP S5214992B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP747972A JPS5214992B2 (ja) | 1972-01-19 | 1972-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP747972A JPS5214992B2 (ja) | 1972-01-19 | 1972-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4877888A JPS4877888A (ja) | 1973-10-19 |
| JPS5214992B2 true JPS5214992B2 (ja) | 1977-04-26 |
Family
ID=11666893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP747972A Expired JPS5214992B2 (ja) | 1972-01-19 | 1972-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5214992B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51989A (ja) * | 1974-06-21 | 1976-01-07 | Yaskawa Denki Seisakusho Kk | Ketsukankenshutsusochi |
| JPS5759959Y2 (ja) * | 1976-02-27 | 1982-12-21 | ||
| JP6804260B2 (ja) * | 2016-10-26 | 2020-12-23 | 株式会社ニューフレアテクノロジー | 検査装置および変位量検出方法 |
-
1972
- 1972-01-19 JP JP747972A patent/JPS5214992B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4877888A (ja) | 1973-10-19 |