JPS52148043U - - Google Patents
Info
- Publication number
- JPS52148043U JPS52148043U JP5672676U JP5672676U JPS52148043U JP S52148043 U JPS52148043 U JP S52148043U JP 5672676 U JP5672676 U JP 5672676U JP 5672676 U JP5672676 U JP 5672676U JP S52148043 U JPS52148043 U JP S52148043U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5672676U JPS52148043U (de) | 1976-05-06 | 1976-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5672676U JPS52148043U (de) | 1976-05-06 | 1976-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52148043U true JPS52148043U (de) | 1977-11-09 |
Family
ID=28515672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5672676U Pending JPS52148043U (de) | 1976-05-06 | 1976-05-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52148043U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS602826U (ja) * | 1983-06-21 | 1985-01-10 | 小松電子金属株式会社 | 半導体ウエ−ハ容器 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49133555A (de) * | 1972-10-26 | 1974-12-21 |
-
1976
- 1976-05-06 JP JP5672676U patent/JPS52148043U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49133555A (de) * | 1972-10-26 | 1974-12-21 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS602826U (ja) * | 1983-06-21 | 1985-01-10 | 小松電子金属株式会社 | 半導体ウエ−ハ容器 |