JPS52147976A - Spattering device - Google Patents

Spattering device

Info

Publication number
JPS52147976A
JPS52147976A JP6518676A JP6518676A JPS52147976A JP S52147976 A JPS52147976 A JP S52147976A JP 6518676 A JP6518676 A JP 6518676A JP 6518676 A JP6518676 A JP 6518676A JP S52147976 A JPS52147976 A JP S52147976A
Authority
JP
Japan
Prior art keywords
spattering device
semispherical
spherical
spattering
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6518676A
Other languages
Japanese (ja)
Other versions
JPS5832497B2 (en
Inventor
Kenzo Ochi
Osamu Yamazaki
Kentaro Setsune
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6518676A priority Critical patent/JPS5832497B2/en
Publication of JPS52147976A publication Critical patent/JPS52147976A/en
Publication of JPS5832497B2 publication Critical patent/JPS5832497B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To enhance the performance of the spattering device and to secure a uniform film thickness distribution by having a spherical or semispherical cathode into the center part of a spherical or semispherical anode.
COPYRIGHT: (C)1977,JPO&Japio
JP6518676A 1976-06-03 1976-06-03 sputtering equipment Expired JPS5832497B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6518676A JPS5832497B2 (en) 1976-06-03 1976-06-03 sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6518676A JPS5832497B2 (en) 1976-06-03 1976-06-03 sputtering equipment

Publications (2)

Publication Number Publication Date
JPS52147976A true JPS52147976A (en) 1977-12-08
JPS5832497B2 JPS5832497B2 (en) 1983-07-13

Family

ID=13279628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6518676A Expired JPS5832497B2 (en) 1976-06-03 1976-06-03 sputtering equipment

Country Status (1)

Country Link
JP (1) JPS5832497B2 (en)

Also Published As

Publication number Publication date
JPS5832497B2 (en) 1983-07-13

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