JPS52147073A - Ion implantation apparatus - Google Patents
Ion implantation apparatusInfo
- Publication number
- JPS52147073A JPS52147073A JP6361576A JP6361576A JPS52147073A JP S52147073 A JPS52147073 A JP S52147073A JP 6361576 A JP6361576 A JP 6361576A JP 6361576 A JP6361576 A JP 6361576A JP S52147073 A JPS52147073 A JP S52147073A
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- implantation apparatus
- implantation
- becomes
- low energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To accurately determine the total quantity of implantation by indirectly estimating the quantity of sputtering neutral particles which becomes a problem at the time of low energy implantation.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6361576A JPS5853469B2 (en) | 1976-06-02 | 1976-06-02 | Ion implantation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6361576A JPS5853469B2 (en) | 1976-06-02 | 1976-06-02 | Ion implantation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52147073A true JPS52147073A (en) | 1977-12-07 |
JPS5853469B2 JPS5853469B2 (en) | 1983-11-29 |
Family
ID=13234380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6361576A Expired JPS5853469B2 (en) | 1976-06-02 | 1976-06-02 | Ion implantation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5853469B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55124936A (en) * | 1979-03-22 | 1980-09-26 | Hitachi Ltd | Control method of beam current in ion drive |
JPS5750759A (en) * | 1980-09-10 | 1982-03-25 | Hitachi Ltd | Charged particle irradiator |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0234755Y2 (en) * | 1984-09-06 | 1990-09-19 |
-
1976
- 1976-06-02 JP JP6361576A patent/JPS5853469B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55124936A (en) * | 1979-03-22 | 1980-09-26 | Hitachi Ltd | Control method of beam current in ion drive |
JPS5750759A (en) * | 1980-09-10 | 1982-03-25 | Hitachi Ltd | Charged particle irradiator |
Also Published As
Publication number | Publication date |
---|---|
JPS5853469B2 (en) | 1983-11-29 |
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