JPS5214690B2 - - Google Patents
Info
- Publication number
- JPS5214690B2 JPS5214690B2 JP47004938A JP493872A JPS5214690B2 JP S5214690 B2 JPS5214690 B2 JP S5214690B2 JP 47004938 A JP47004938 A JP 47004938A JP 493872 A JP493872 A JP 493872A JP S5214690 B2 JPS5214690 B2 JP S5214690B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47004938A JPS5214690B2 (https=) | 1972-01-08 | 1972-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47004938A JPS5214690B2 (https=) | 1972-01-08 | 1972-01-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4874431A JPS4874431A (https=) | 1973-10-06 |
| JPS5214690B2 true JPS5214690B2 (https=) | 1977-04-23 |
Family
ID=11597502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47004938A Expired JPS5214690B2 (https=) | 1972-01-08 | 1972-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5214690B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5724669B2 (https=) * | 1974-06-27 | 1982-05-25 | ||
| US4448659A (en) * | 1983-09-12 | 1984-05-15 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization including initial target cleaning |
-
1972
- 1972-01-08 JP JP47004938A patent/JPS5214690B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4874431A (https=) | 1973-10-06 |