JPS4874431A - - Google Patents
Info
- Publication number
- JPS4874431A JPS4874431A JP47004938A JP493872A JPS4874431A JP S4874431 A JPS4874431 A JP S4874431A JP 47004938 A JP47004938 A JP 47004938A JP 493872 A JP493872 A JP 493872A JP S4874431 A JPS4874431 A JP S4874431A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47004938A JPS5214690B2 (https=) | 1972-01-08 | 1972-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47004938A JPS5214690B2 (https=) | 1972-01-08 | 1972-01-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4874431A true JPS4874431A (https=) | 1973-10-06 |
| JPS5214690B2 JPS5214690B2 (https=) | 1977-04-23 |
Family
ID=11597502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47004938A Expired JPS5214690B2 (https=) | 1972-01-08 | 1972-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5214690B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512999A (https=) * | 1974-06-27 | 1976-01-12 | Matsushita Electric Industrial Co Ltd | |
| JPS60138067A (ja) * | 1983-09-12 | 1985-07-22 | ヴアツク テツク システムズ インコ−ポレ−テツド | ア−ク安定化方法および装置 |
-
1972
- 1972-01-08 JP JP47004938A patent/JPS5214690B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512999A (https=) * | 1974-06-27 | 1976-01-12 | Matsushita Electric Industrial Co Ltd | |
| JPS60138067A (ja) * | 1983-09-12 | 1985-07-22 | ヴアツク テツク システムズ インコ−ポレ−テツド | ア−ク安定化方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5214690B2 (https=) | 1977-04-23 |