JPS5214690B2 - - Google Patents

Info

Publication number
JPS5214690B2
JPS5214690B2 JP47004938A JP493872A JPS5214690B2 JP S5214690 B2 JPS5214690 B2 JP S5214690B2 JP 47004938 A JP47004938 A JP 47004938A JP 493872 A JP493872 A JP 493872A JP S5214690 B2 JPS5214690 B2 JP S5214690B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47004938A
Other languages
Japanese (ja)
Other versions
JPS4874431A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47004938A priority Critical patent/JPS5214690B2/ja
Publication of JPS4874431A publication Critical patent/JPS4874431A/ja
Publication of JPS5214690B2 publication Critical patent/JPS5214690B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP47004938A 1972-01-08 1972-01-08 Expired JPS5214690B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47004938A JPS5214690B2 (enrdf_load_stackoverflow) 1972-01-08 1972-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47004938A JPS5214690B2 (enrdf_load_stackoverflow) 1972-01-08 1972-01-08

Publications (2)

Publication Number Publication Date
JPS4874431A JPS4874431A (enrdf_load_stackoverflow) 1973-10-06
JPS5214690B2 true JPS5214690B2 (enrdf_load_stackoverflow) 1977-04-23

Family

ID=11597502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47004938A Expired JPS5214690B2 (enrdf_load_stackoverflow) 1972-01-08 1972-01-08

Country Status (1)

Country Link
JP (1) JPS5214690B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724669B2 (enrdf_load_stackoverflow) * 1974-06-27 1982-05-25
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning

Also Published As

Publication number Publication date
JPS4874431A (enrdf_load_stackoverflow) 1973-10-06

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