JPS4874431A - - Google Patents

Info

Publication number
JPS4874431A
JPS4874431A JP47004938A JP493872A JPS4874431A JP S4874431 A JPS4874431 A JP S4874431A JP 47004938 A JP47004938 A JP 47004938A JP 493872 A JP493872 A JP 493872A JP S4874431 A JPS4874431 A JP S4874431A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47004938A
Other languages
Japanese (ja)
Other versions
JPS5214690B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47004938A priority Critical patent/JPS5214690B2/ja
Publication of JPS4874431A publication Critical patent/JPS4874431A/ja
Publication of JPS5214690B2 publication Critical patent/JPS5214690B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
JP47004938A 1972-01-08 1972-01-08 Expired JPS5214690B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47004938A JPS5214690B2 (enrdf_load_stackoverflow) 1972-01-08 1972-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47004938A JPS5214690B2 (enrdf_load_stackoverflow) 1972-01-08 1972-01-08

Publications (2)

Publication Number Publication Date
JPS4874431A true JPS4874431A (enrdf_load_stackoverflow) 1973-10-06
JPS5214690B2 JPS5214690B2 (enrdf_load_stackoverflow) 1977-04-23

Family

ID=11597502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47004938A Expired JPS5214690B2 (enrdf_load_stackoverflow) 1972-01-08 1972-01-08

Country Status (1)

Country Link
JP (1) JPS5214690B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512999A (enrdf_load_stackoverflow) * 1974-06-27 1976-01-12 Matsushita Electric Industrial Co Ltd
JPS60138067A (ja) * 1983-09-12 1985-07-22 ヴアツク　テツク　システムズ　インコ−ポレ−テツド ア−ク安定化方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512999A (enrdf_load_stackoverflow) * 1974-06-27 1976-01-12 Matsushita Electric Industrial Co Ltd
JPS60138067A (ja) * 1983-09-12 1985-07-22 ヴアツク　テツク　システムズ　インコ−ポレ−テツド ア−ク安定化方法および装置

Also Published As

Publication number Publication date
JPS5214690B2 (enrdf_load_stackoverflow) 1977-04-23

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