JPS52141704A - Photo mask and method of making same - Google Patents

Photo mask and method of making same

Info

Publication number
JPS52141704A
JPS52141704A JP5866176A JP5866176A JPS52141704A JP S52141704 A JPS52141704 A JP S52141704A JP 5866176 A JP5866176 A JP 5866176A JP 5866176 A JP5866176 A JP 5866176A JP S52141704 A JPS52141704 A JP S52141704A
Authority
JP
Japan
Prior art keywords
making same
photo mask
photo
mask
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5866176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5755137B2 (show.php
Inventor
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5866176A priority Critical patent/JPS52141704A/ja
Publication of JPS52141704A publication Critical patent/JPS52141704A/ja
Publication of JPS5755137B2 publication Critical patent/JPS5755137B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5866176A 1976-05-20 1976-05-20 Photo mask and method of making same Granted JPS52141704A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5866176A JPS52141704A (en) 1976-05-20 1976-05-20 Photo mask and method of making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5866176A JPS52141704A (en) 1976-05-20 1976-05-20 Photo mask and method of making same

Publications (2)

Publication Number Publication Date
JPS52141704A true JPS52141704A (en) 1977-11-26
JPS5755137B2 JPS5755137B2 (show.php) 1982-11-22

Family

ID=13090763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5866176A Granted JPS52141704A (en) 1976-05-20 1976-05-20 Photo mask and method of making same

Country Status (1)

Country Link
JP (1) JPS52141704A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10640457B2 (en) 2009-12-10 2020-05-05 The Trustees Of Columbia University In The City Of New York Histone acetyltransferase activators and uses thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10640457B2 (en) 2009-12-10 2020-05-05 The Trustees Of Columbia University In The City Of New York Histone acetyltransferase activators and uses thereof
US11034647B2 (en) 2009-12-10 2021-06-15 The Trustees Of Columbia University In The City Of New York Histone acetyltransferase activators and uses thereof

Also Published As

Publication number Publication date
JPS5755137B2 (show.php) 1982-11-22

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