JPS5213940B2 - - Google Patents

Info

Publication number
JPS5213940B2
JPS5213940B2 JP7513672A JP7513672A JPS5213940B2 JP S5213940 B2 JPS5213940 B2 JP S5213940B2 JP 7513672 A JP7513672 A JP 7513672A JP 7513672 A JP7513672 A JP 7513672A JP S5213940 B2 JPS5213940 B2 JP S5213940B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7513672A
Other languages
Japanese (ja)
Other versions
JPS4934346A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7513672A priority Critical patent/JPS5213940B2/ja
Publication of JPS4934346A publication Critical patent/JPS4934346A/ja
Publication of JPS5213940B2 publication Critical patent/JPS5213940B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP7513672A 1972-07-28 1972-07-28 Expired JPS5213940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7513672A JPS5213940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-28 1972-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7513672A JPS5213940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-28 1972-07-28

Publications (2)

Publication Number Publication Date
JPS4934346A JPS4934346A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-29
JPS5213940B2 true JPS5213940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-04-18

Family

ID=13567459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7513672A Expired JPS5213940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-28 1972-07-28

Country Status (1)

Country Link
JP (1) JPS5213940B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440752U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-08-20 1979-03-17

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02310450A (ja) * 1989-05-26 1990-12-26 Hajime Sangyo Kk 物体の検査装置
JPH03117709U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-03-15 1991-12-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440752U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-08-20 1979-03-17

Also Published As

Publication number Publication date
JPS4934346A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-29

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