JPS52136919U - - Google Patents
Info
- Publication number
- JPS52136919U JPS52136919U JP4506276U JP4506276U JPS52136919U JP S52136919 U JPS52136919 U JP S52136919U JP 4506276 U JP4506276 U JP 4506276U JP 4506276 U JP4506276 U JP 4506276U JP S52136919 U JPS52136919 U JP S52136919U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4506276U JPS5812830Y2 (ja) | 1976-04-13 | 1976-04-13 | エッチング処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4506276U JPS5812830Y2 (ja) | 1976-04-13 | 1976-04-13 | エッチング処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52136919U true JPS52136919U (pt) | 1977-10-18 |
| JPS5812830Y2 JPS5812830Y2 (ja) | 1983-03-11 |
Family
ID=28504125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4506276U Expired JPS5812830Y2 (ja) | 1976-04-13 | 1976-04-13 | エッチング処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5812830Y2 (pt) |
-
1976
- 1976-04-13 JP JP4506276U patent/JPS5812830Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5812830Y2 (ja) | 1983-03-11 |