JPS5213510B2 - - Google Patents

Info

Publication number
JPS5213510B2
JPS5213510B2 JP48022072A JP2207273A JPS5213510B2 JP S5213510 B2 JPS5213510 B2 JP S5213510B2 JP 48022072 A JP48022072 A JP 48022072A JP 2207273 A JP2207273 A JP 2207273A JP S5213510 B2 JPS5213510 B2 JP S5213510B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48022072A
Other versions
JPS49110578A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48022072A priority Critical patent/JPS5213510B2/ja
Priority to US05/445,898 priority patent/US4016829A/en
Publication of JPS49110578A publication Critical patent/JPS49110578A/ja
Publication of JPS5213510B2 publication Critical patent/JPS5213510B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/064—Rotating sliding boat system
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/068—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP48022072A 1973-02-26 1973-02-26 Expired JPS5213510B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP48022072A JPS5213510B2 (ja) 1973-02-26 1973-02-26
US05/445,898 US4016829A (en) 1973-02-26 1974-02-26 Apparatus for crystal growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48022072A JPS5213510B2 (ja) 1973-02-26 1973-02-26

Publications (2)

Publication Number Publication Date
JPS49110578A JPS49110578A (ja) 1974-10-21
JPS5213510B2 true JPS5213510B2 (ja) 1977-04-14

Family

ID=12072671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48022072A Expired JPS5213510B2 (ja) 1973-02-26 1973-02-26

Country Status (2)

Country Link
US (1) US4016829A (ja)
JP (1) JPS5213510B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3036643C2 (de) * 1980-09-29 1984-09-20 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Flüssigphasen-Epitaxie
JP3892703B2 (ja) * 2001-10-19 2007-03-14 富士通株式会社 半導体基板用治具及びこれを用いた半導体装置の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560276A (en) * 1968-12-23 1971-02-02 Bell Telephone Labor Inc Technique for fabrication of multilayered semiconductor structure
US3565702A (en) * 1969-02-14 1971-02-23 Rca Corp Depositing successive epitaxial semiconductive layers from the liquid phase
US3598169A (en) * 1969-03-13 1971-08-10 United Aircraft Corp Method and apparatus for casting directionally solidified discs and the like
DE1936443C3 (de) * 1969-07-17 1975-03-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum Aufwachsen homogen dotierter, planparalleler epitaktischer ScNchten aus halbleitenden Verbindungen durch Schmelzepitaxie
BE754519A (fr) * 1969-08-06 1971-02-08 Motorola Inc Procede et appareil pour la croissance de couches epitaxiales en phase liquide sur des semi-conducteurs
US3692592A (en) * 1970-02-12 1972-09-19 Rca Corp Method and apparatus for depositing epitaxial semiconductive layers from the liquid phase
US3665888A (en) * 1970-03-16 1972-05-30 Bell Telephone Labor Inc Horizontal liquid phase crystal growth apparatus
US3647578A (en) * 1970-04-30 1972-03-07 Gen Electric Selective uniform liquid phase epitaxial growth
JPS53271B1 (ja) * 1971-03-05 1978-01-06
US3741825A (en) * 1971-07-08 1973-06-26 Rca Corp Method of depositing an epitaxial semiconductor layer from the liquidphase
US3767481A (en) * 1972-04-07 1973-10-23 Rca Corp Method for epitaxially growing layers of a semiconductor material from the liquid phase
US3895765A (en) * 1973-11-19 1975-07-22 Motorola Inc Reel to reel cartridge tape player system

Also Published As

Publication number Publication date
US4016829A (en) 1977-04-12
JPS49110578A (ja) 1974-10-21

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