JPS52133271A - Negative pressure gauge - Google Patents
Negative pressure gaugeInfo
- Publication number
- JPS52133271A JPS52133271A JP5057576A JP5057576A JPS52133271A JP S52133271 A JPS52133271 A JP S52133271A JP 5057576 A JP5057576 A JP 5057576A JP 5057576 A JP5057576 A JP 5057576A JP S52133271 A JPS52133271 A JP S52133271A
- Authority
- JP
- Japan
- Prior art keywords
- negative pressure
- pressure gauge
- pressure
- accuracy
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To measure pressures below the atmospheric pressure with accuracy and high dependability by containing a piezo resistance-effect element and a beam in an air-tight chamber partitioned by a pressure-receiving plate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51050575A JPS5814971B2 (en) | 1976-05-01 | 1976-05-01 | negative pressure gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51050575A JPS5814971B2 (en) | 1976-05-01 | 1976-05-01 | negative pressure gauge |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52133271A true JPS52133271A (en) | 1977-11-08 |
JPS5814971B2 JPS5814971B2 (en) | 1983-03-23 |
Family
ID=12862783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51050575A Expired JPS5814971B2 (en) | 1976-05-01 | 1976-05-01 | negative pressure gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5814971B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4953088A (en) * | 1972-09-20 | 1974-05-23 |
-
1976
- 1976-05-01 JP JP51050575A patent/JPS5814971B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4953088A (en) * | 1972-09-20 | 1974-05-23 |
Also Published As
Publication number | Publication date |
---|---|
JPS5814971B2 (en) | 1983-03-23 |
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