JPS52133271A - Negative pressure gauge - Google Patents

Negative pressure gauge

Info

Publication number
JPS52133271A
JPS52133271A JP5057576A JP5057576A JPS52133271A JP S52133271 A JPS52133271 A JP S52133271A JP 5057576 A JP5057576 A JP 5057576A JP 5057576 A JP5057576 A JP 5057576A JP S52133271 A JPS52133271 A JP S52133271A
Authority
JP
Japan
Prior art keywords
negative pressure
pressure gauge
pressure
accuracy
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5057576A
Other languages
Japanese (ja)
Other versions
JPS5814971B2 (en
Inventor
Kenzo Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP51050575A priority Critical patent/JPS5814971B2/en
Publication of JPS52133271A publication Critical patent/JPS52133271A/en
Publication of JPS5814971B2 publication Critical patent/JPS5814971B2/en
Expired legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To measure pressures below the atmospheric pressure with accuracy and high dependability by containing a piezo resistance-effect element and a beam in an air-tight chamber partitioned by a pressure-receiving plate.
COPYRIGHT: (C)1977,JPO&Japio
JP51050575A 1976-05-01 1976-05-01 negative pressure gauge Expired JPS5814971B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51050575A JPS5814971B2 (en) 1976-05-01 1976-05-01 negative pressure gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51050575A JPS5814971B2 (en) 1976-05-01 1976-05-01 negative pressure gauge

Publications (2)

Publication Number Publication Date
JPS52133271A true JPS52133271A (en) 1977-11-08
JPS5814971B2 JPS5814971B2 (en) 1983-03-23

Family

ID=12862783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51050575A Expired JPS5814971B2 (en) 1976-05-01 1976-05-01 negative pressure gauge

Country Status (1)

Country Link
JP (1) JPS5814971B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4953088A (en) * 1972-09-20 1974-05-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4953088A (en) * 1972-09-20 1974-05-23

Also Published As

Publication number Publication date
JPS5814971B2 (en) 1983-03-23

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