JPS52133216U - - Google Patents
Info
- Publication number
- JPS52133216U JPS52133216U JP4308276U JP4308276U JPS52133216U JP S52133216 U JPS52133216 U JP S52133216U JP 4308276 U JP4308276 U JP 4308276U JP 4308276 U JP4308276 U JP 4308276U JP S52133216 U JPS52133216 U JP S52133216U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976043082U JPS604652Y2 (ja) | 1976-04-06 | 1976-04-06 | イオンエツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976043082U JPS604652Y2 (ja) | 1976-04-06 | 1976-04-06 | イオンエツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52133216U true JPS52133216U (https=) | 1977-10-11 |
| JPS604652Y2 JPS604652Y2 (ja) | 1985-02-12 |
Family
ID=28502144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976043082U Expired JPS604652Y2 (ja) | 1976-04-06 | 1976-04-06 | イオンエツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS604652Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50152937A (https=) * | 1974-05-10 | 1975-12-09 |
-
1976
- 1976-04-06 JP JP1976043082U patent/JPS604652Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50152937A (https=) * | 1974-05-10 | 1975-12-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS604652Y2 (ja) | 1985-02-12 |