JPS52133164U - - Google Patents
Info
- Publication number
- JPS52133164U JPS52133164U JP4097476U JP4097476U JPS52133164U JP S52133164 U JPS52133164 U JP S52133164U JP 4097476 U JP4097476 U JP 4097476U JP 4097476 U JP4097476 U JP 4097476U JP S52133164 U JPS52133164 U JP S52133164U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040974U JPS565309Y2 (da) | 1976-04-05 | 1976-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040974U JPS565309Y2 (da) | 1976-04-05 | 1976-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52133164U true JPS52133164U (da) | 1977-10-08 |
| JPS565309Y2 JPS565309Y2 (da) | 1981-02-05 |
Family
ID=28500078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976040974U Expired JPS565309Y2 (da) | 1976-04-05 | 1976-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS565309Y2 (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09115894A (ja) * | 1995-07-10 | 1997-05-02 | Applied Materials Inc | マイクロ波プラズマベースアプリケータ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341505A (en) * | 1976-09-07 | 1978-04-15 | Weyerhaeuser Co | Process for contact oxydation of pulping reactor leaving gas with oxygen |
-
1976
- 1976-04-05 JP JP1976040974U patent/JPS565309Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341505A (en) * | 1976-09-07 | 1978-04-15 | Weyerhaeuser Co | Process for contact oxydation of pulping reactor leaving gas with oxygen |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09115894A (ja) * | 1995-07-10 | 1997-05-02 | Applied Materials Inc | マイクロ波プラズマベースアプリケータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS565309Y2 (da) | 1981-02-05 |