JPS52131959U - - Google Patents

Info

Publication number
JPS52131959U
JPS52131959U JP4031376U JP4031376U JPS52131959U JP S52131959 U JPS52131959 U JP S52131959U JP 4031376 U JP4031376 U JP 4031376U JP 4031376 U JP4031376 U JP 4031376U JP S52131959 U JPS52131959 U JP S52131959U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4031376U
Other languages
Japanese (ja)
Other versions
JPS58293Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976040313U priority Critical patent/JPS58293Y2/ja
Publication of JPS52131959U publication Critical patent/JPS52131959U/ja
Application granted granted Critical
Publication of JPS58293Y2 publication Critical patent/JPS58293Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1976040313U 1976-04-01 1976-04-01 半導体熱処理炉芯管 Expired JPS58293Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976040313U JPS58293Y2 (ja) 1976-04-01 1976-04-01 半導体熱処理炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976040313U JPS58293Y2 (ja) 1976-04-01 1976-04-01 半導体熱処理炉芯管

Publications (2)

Publication Number Publication Date
JPS52131959U true JPS52131959U (enrdf_load_stackoverflow) 1977-10-06
JPS58293Y2 JPS58293Y2 (ja) 1983-01-06

Family

ID=28499443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976040313U Expired JPS58293Y2 (ja) 1976-04-01 1976-04-01 半導体熱処理炉芯管

Country Status (1)

Country Link
JP (1) JPS58293Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149878U (enrdf_load_stackoverflow) * 1974-10-15 1976-04-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149878U (enrdf_load_stackoverflow) * 1974-10-15 1976-04-15

Also Published As

Publication number Publication date
JPS58293Y2 (ja) 1983-01-06

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