JPS52131959U - - Google Patents
Info
- Publication number
- JPS52131959U JPS52131959U JP4031376U JP4031376U JPS52131959U JP S52131959 U JPS52131959 U JP S52131959U JP 4031376 U JP4031376 U JP 4031376U JP 4031376 U JP4031376 U JP 4031376U JP S52131959 U JPS52131959 U JP S52131959U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040313U JPS58293Y2 (ja) | 1976-04-01 | 1976-04-01 | 半導体熱処理炉芯管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976040313U JPS58293Y2 (ja) | 1976-04-01 | 1976-04-01 | 半導体熱処理炉芯管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52131959U true JPS52131959U (de) | 1977-10-06 |
| JPS58293Y2 JPS58293Y2 (ja) | 1983-01-06 |
Family
ID=28499443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976040313U Expired JPS58293Y2 (ja) | 1976-04-01 | 1976-04-01 | 半導体熱処理炉芯管 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58293Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5149878U (de) * | 1974-10-15 | 1976-04-15 |
-
1976
- 1976-04-01 JP JP1976040313U patent/JPS58293Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5149878U (de) * | 1974-10-15 | 1976-04-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58293Y2 (ja) | 1983-01-06 |