JPS52131032U - - Google Patents
Info
- Publication number
- JPS52131032U JPS52131032U JP3925676U JP3925676U JPS52131032U JP S52131032 U JPS52131032 U JP S52131032U JP 3925676 U JP3925676 U JP 3925676U JP 3925676 U JP3925676 U JP 3925676U JP S52131032 U JPS52131032 U JP S52131032U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Shutters For Cameras (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3925676U JPS52131032U (ko) | 1976-03-31 | 1976-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3925676U JPS52131032U (ko) | 1976-03-31 | 1976-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52131032U true JPS52131032U (ko) | 1977-10-05 |
Family
ID=28498424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3925676U Pending JPS52131032U (ko) | 1976-03-31 | 1976-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52131032U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170106352A (ko) * | 2014-12-31 | 2017-09-20 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | 포토리소그래피 머신의 노출 시스템을 위한 셀프-댐핑 셔터 장치 |
-
1976
- 1976-03-31 JP JP3925676U patent/JPS52131032U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170106352A (ko) * | 2014-12-31 | 2017-09-20 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | 포토리소그래피 머신의 노출 시스템을 위한 셀프-댐핑 셔터 장치 |
JP2018502329A (ja) * | 2014-12-31 | 2018-01-25 | シャンハイ マイクロ エレクトロニクス イクイプメント | ホトリソグラフィ装置の露光システムのための自己減衰シャッター |