JPS52126176A - Etching device - Google Patents

Etching device

Info

Publication number
JPS52126176A
JPS52126176A JP4278976A JP4278976A JPS52126176A JP S52126176 A JPS52126176 A JP S52126176A JP 4278976 A JP4278976 A JP 4278976A JP 4278976 A JP4278976 A JP 4278976A JP S52126176 A JPS52126176 A JP S52126176A
Authority
JP
Japan
Prior art keywords
sample
etching device
etching
dept
assured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4278976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Keizo Suzuki
Sadayuki Okudaira
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4278976A priority Critical patent/JPS52126176A/ja
Publication of JPS52126176A publication Critical patent/JPS52126176A/ja
Publication of JPS614177B2 publication Critical patent/JPS614177B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4278976A 1976-04-15 1976-04-15 Etching device Granted JPS52126176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4278976A JPS52126176A (en) 1976-04-15 1976-04-15 Etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4278976A JPS52126176A (en) 1976-04-15 1976-04-15 Etching device

Publications (2)

Publication Number Publication Date
JPS52126176A true JPS52126176A (en) 1977-10-22
JPS614177B2 JPS614177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-02-07

Family

ID=12645722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4278976A Granted JPS52126176A (en) 1976-04-15 1976-04-15 Etching device

Country Status (1)

Country Link
JP (1) JPS52126176A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526643A (en) * 1983-03-24 1985-07-02 Tokyo Shibaura Denki Kabushiki Kaisha Dry etching apparatus using reactive ions
JPS61128527A (ja) * 1984-11-27 1986-06-16 Mitsubishi Electric Corp プラズマエツチング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526643A (en) * 1983-03-24 1985-07-02 Tokyo Shibaura Denki Kabushiki Kaisha Dry etching apparatus using reactive ions
JPS61128527A (ja) * 1984-11-27 1986-06-16 Mitsubishi Electric Corp プラズマエツチング装置

Also Published As

Publication number Publication date
JPS614177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-02-07

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