JPS52123169A - Method of making semiconductor devices using acoustic vibration - Google Patents

Method of making semiconductor devices using acoustic vibration

Info

Publication number
JPS52123169A
JPS52123169A JP3834176A JP3834176A JPS52123169A JP S52123169 A JPS52123169 A JP S52123169A JP 3834176 A JP3834176 A JP 3834176A JP 3834176 A JP3834176 A JP 3834176A JP S52123169 A JPS52123169 A JP S52123169A
Authority
JP
Japan
Prior art keywords
semiconductor devices
acoustic vibration
making semiconductor
making
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3834176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5338593B2 (enExample
Inventor
Eichi Shiyuuuke Guentaa
Yan Kueiishiyu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to JP3834176A priority Critical patent/JPS52123169A/ja
Publication of JPS52123169A publication Critical patent/JPS52123169A/ja
Publication of JPS5338593B2 publication Critical patent/JPS5338593B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP3834176A 1976-04-07 1976-04-07 Method of making semiconductor devices using acoustic vibration Granted JPS52123169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3834176A JPS52123169A (en) 1976-04-07 1976-04-07 Method of making semiconductor devices using acoustic vibration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3834176A JPS52123169A (en) 1976-04-07 1976-04-07 Method of making semiconductor devices using acoustic vibration

Publications (2)

Publication Number Publication Date
JPS52123169A true JPS52123169A (en) 1977-10-17
JPS5338593B2 JPS5338593B2 (enExample) 1978-10-16

Family

ID=12522572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3834176A Granted JPS52123169A (en) 1976-04-07 1976-04-07 Method of making semiconductor devices using acoustic vibration

Country Status (1)

Country Link
JP (1) JPS52123169A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177366U (ja) * 1983-05-13 1984-11-27 南　景同 安心花瓶

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture

Also Published As

Publication number Publication date
JPS5338593B2 (enExample) 1978-10-16

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