JPS52122660U - - Google Patents

Info

Publication number
JPS52122660U
JPS52122660U JP2990476U JP2990476U JPS52122660U JP S52122660 U JPS52122660 U JP S52122660U JP 2990476 U JP2990476 U JP 2990476U JP 2990476 U JP2990476 U JP 2990476U JP S52122660 U JPS52122660 U JP S52122660U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2990476U
Other languages
Japanese (ja)
Other versions
JPS5540756Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976029904U priority Critical patent/JPS5540756Y2/ja
Publication of JPS52122660U publication Critical patent/JPS52122660U/ja
Application granted granted Critical
Publication of JPS5540756Y2 publication Critical patent/JPS5540756Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Spray Control Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1976029904U 1976-03-15 1976-03-15 Expired JPS5540756Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976029904U JPS5540756Y2 (fr) 1976-03-15 1976-03-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976029904U JPS5540756Y2 (fr) 1976-03-15 1976-03-15

Publications (2)

Publication Number Publication Date
JPS52122660U true JPS52122660U (fr) 1977-09-17
JPS5540756Y2 JPS5540756Y2 (fr) 1980-09-24

Family

ID=28489469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976029904U Expired JPS5540756Y2 (fr) 1976-03-15 1976-03-15

Country Status (1)

Country Link
JP (1) JPS5540756Y2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004507619A (ja) * 2000-09-01 2004-03-11 アイクストロン、アーゲー Ｃｖｄコーティング装置
JP2010024475A (ja) * 2008-07-16 2010-02-04 Denso Corp 成膜装置およびそれを用いた製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501637A (fr) * 1973-05-07 1975-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501637A (fr) * 1973-05-07 1975-01-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004507619A (ja) * 2000-09-01 2004-03-11 アイクストロン、アーゲー Ｃｖｄコーティング装置
JP2010024475A (ja) * 2008-07-16 2010-02-04 Denso Corp 成膜装置およびそれを用いた製造方法

Also Published As

Publication number Publication date
JPS5540756Y2 (fr) 1980-09-24

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