JPS52122660U - - Google Patents
Info
- Publication number
- JPS52122660U JPS52122660U JP2990476U JP2990476U JPS52122660U JP S52122660 U JPS52122660 U JP S52122660U JP 2990476 U JP2990476 U JP 2990476U JP 2990476 U JP2990476 U JP 2990476U JP S52122660 U JPS52122660 U JP S52122660U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Spray Control Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976029904U JPS5540756Y2 (en) | 1976-03-15 | 1976-03-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976029904U JPS5540756Y2 (en) | 1976-03-15 | 1976-03-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52122660U true JPS52122660U (en) | 1977-09-17 |
JPS5540756Y2 JPS5540756Y2 (en) | 1980-09-24 |
Family
ID=28489469
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976029904U Expired JPS5540756Y2 (en) | 1976-03-15 | 1976-03-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5540756Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004507619A (en) * | 2000-09-01 | 2004-03-11 | アイクストロン、アーゲー | CVD coating equipment |
JP2010024475A (en) * | 2008-07-16 | 2010-02-04 | Denso Corp | Film deposition apparatus, and manufacturing method using the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501637A (en) * | 1973-05-07 | 1975-01-09 |
-
1976
- 1976-03-15 JP JP1976029904U patent/JPS5540756Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501637A (en) * | 1973-05-07 | 1975-01-09 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004507619A (en) * | 2000-09-01 | 2004-03-11 | アイクストロン、アーゲー | CVD coating equipment |
JP2010024475A (en) * | 2008-07-16 | 2010-02-04 | Denso Corp | Film deposition apparatus, and manufacturing method using the same |
Also Published As
Publication number | Publication date |
---|---|
JPS5540756Y2 (en) | 1980-09-24 |