JPS52119352A - Method of accurately supplying determinate very small quantity of gas - Google Patents

Method of accurately supplying determinate very small quantity of gas

Info

Publication number
JPS52119352A
JPS52119352A JP3572476A JP3572476A JPS52119352A JP S52119352 A JPS52119352 A JP S52119352A JP 3572476 A JP3572476 A JP 3572476A JP 3572476 A JP3572476 A JP 3572476A JP S52119352 A JPS52119352 A JP S52119352A
Authority
JP
Japan
Prior art keywords
determinate
gas
small quantity
accurately supplying
accurately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3572476A
Other languages
Japanese (ja)
Inventor
Hiroshi Kawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHUBU DENKI SEISAKUSHIYO KK
Original Assignee
CHUBU DENKI SEISAKUSHIYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHUBU DENKI SEISAKUSHIYO KK filed Critical CHUBU DENKI SEISAKUSHIYO KK
Priority to JP3572476A priority Critical patent/JPS52119352A/en
Publication of JPS52119352A publication Critical patent/JPS52119352A/en
Pending legal-status Critical Current

Links

JP3572476A 1976-03-31 1976-03-31 Method of accurately supplying determinate very small quantity of gas Pending JPS52119352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3572476A JPS52119352A (en) 1976-03-31 1976-03-31 Method of accurately supplying determinate very small quantity of gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3572476A JPS52119352A (en) 1976-03-31 1976-03-31 Method of accurately supplying determinate very small quantity of gas

Publications (1)

Publication Number Publication Date
JPS52119352A true JPS52119352A (en) 1977-10-06

Family

ID=12449792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3572476A Pending JPS52119352A (en) 1976-03-31 1976-03-31 Method of accurately supplying determinate very small quantity of gas

Country Status (1)

Country Link
JP (1) JPS52119352A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011227091A (en) * 2000-02-07 2011-11-10 Ethicon Inc Method and apparatus for feeding and measuring liquid sterilizing agent
WO2017104543A1 (en) * 2015-12-14 2017-06-22 山東新華医療器械股▲分▼有限公司 Liquid supplying system and method for driving same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011227091A (en) * 2000-02-07 2011-11-10 Ethicon Inc Method and apparatus for feeding and measuring liquid sterilizing agent
WO2017104543A1 (en) * 2015-12-14 2017-06-22 山東新華医療器械股▲分▼有限公司 Liquid supplying system and method for driving same
JPWO2017104543A1 (en) * 2015-12-14 2018-11-29 サラヤ株式会社 Liquid supply system and driving method thereof
US10444050B2 (en) 2015-12-14 2019-10-15 Saraya Co., Ltd. Liquid supplying system and method for driving same

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