JPS52117548U - - Google Patents
Info
- Publication number
- JPS52117548U JPS52117548U JP2471276U JP2471276U JPS52117548U JP S52117548 U JPS52117548 U JP S52117548U JP 2471276 U JP2471276 U JP 2471276U JP 2471276 U JP2471276 U JP 2471276U JP S52117548 U JPS52117548 U JP S52117548U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976024712U JPS557555Y2 (https=) | 1976-03-02 | 1976-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976024712U JPS557555Y2 (https=) | 1976-03-02 | 1976-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52117548U true JPS52117548U (https=) | 1977-09-06 |
| JPS557555Y2 JPS557555Y2 (https=) | 1980-02-20 |
Family
ID=28484583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976024712U Expired JPS557555Y2 (https=) | 1976-03-02 | 1976-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS557555Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013067832A (ja) * | 2011-09-22 | 2013-04-18 | Toppan Printing Co Ltd | 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960046U (https=) * | 1972-09-08 | 1974-05-27 | ||
| JPS4974674A (https=) * | 1972-11-10 | 1974-07-18 | ||
| JPS5023382A (https=) * | 1973-07-05 | 1975-03-13 | ||
| JPS50109185A (https=) * | 1974-01-31 | 1975-08-28 |
-
1976
- 1976-03-02 JP JP1976024712U patent/JPS557555Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960046U (https=) * | 1972-09-08 | 1974-05-27 | ||
| JPS4974674A (https=) * | 1972-11-10 | 1974-07-18 | ||
| JPS5023382A (https=) * | 1973-07-05 | 1975-03-13 | ||
| JPS50109185A (https=) * | 1974-01-31 | 1975-08-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013067832A (ja) * | 2011-09-22 | 2013-04-18 | Toppan Printing Co Ltd | 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS557555Y2 (https=) | 1980-02-20 |