JPS52117548U - - Google Patents

Info

Publication number
JPS52117548U
JPS52117548U JP2471276U JP2471276U JPS52117548U JP S52117548 U JPS52117548 U JP S52117548U JP 2471276 U JP2471276 U JP 2471276U JP 2471276 U JP2471276 U JP 2471276U JP S52117548 U JPS52117548 U JP S52117548U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2471276U
Other languages
Japanese (ja)
Other versions
JPS557555Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976024712U priority Critical patent/JPS557555Y2/ja
Publication of JPS52117548U publication Critical patent/JPS52117548U/ja
Application granted granted Critical
Publication of JPS557555Y2 publication Critical patent/JPS557555Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976024712U 1976-03-02 1976-03-02 Expired JPS557555Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976024712U JPS557555Y2 (cs) 1976-03-02 1976-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976024712U JPS557555Y2 (cs) 1976-03-02 1976-03-02

Publications (2)

Publication Number Publication Date
JPS52117548U true JPS52117548U (cs) 1977-09-06
JPS557555Y2 JPS557555Y2 (cs) 1980-02-20

Family

ID=28484583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976024712U Expired JPS557555Y2 (cs) 1976-03-02 1976-03-02

Country Status (1)

Country Link
JP (1) JPS557555Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013067832A (ja) * 2011-09-22 2013-04-18 Toppan Printing Co Ltd 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960046U (cs) * 1972-09-08 1974-05-27
JPS4974674A (cs) * 1972-11-10 1974-07-18
JPS5023382A (cs) * 1973-07-05 1975-03-13
JPS50109185A (cs) * 1974-01-31 1975-08-28

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960046U (cs) * 1972-09-08 1974-05-27
JPS4974674A (cs) * 1972-11-10 1974-07-18
JPS5023382A (cs) * 1973-07-05 1975-03-13
JPS50109185A (cs) * 1974-01-31 1975-08-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013067832A (ja) * 2011-09-22 2013-04-18 Toppan Printing Co Ltd 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置

Also Published As

Publication number Publication date
JPS557555Y2 (cs) 1980-02-20

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