JPS52117299A - Semi-insulating single crystal of the group iii-v compounds - Google Patents
Semi-insulating single crystal of the group iii-v compoundsInfo
- Publication number
- JPS52117299A JPS52117299A JP3481176A JP3481176A JPS52117299A JP S52117299 A JPS52117299 A JP S52117299A JP 3481176 A JP3481176 A JP 3481176A JP 3481176 A JP3481176 A JP 3481176A JP S52117299 A JPS52117299 A JP S52117299A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- compounds
- single crystal
- group iii
- insulating single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a semi-insulating single crystal of the group III-V compounds which is stable during processing by controlling the doping conditions of various impurities so as to improve the yield of the production of elements.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3481176A JPS5946918B2 (en) | 1976-03-29 | 1976-03-29 | Semi-insulating gallium arsenide single crystal |
US05/780,186 US4158851A (en) | 1976-03-29 | 1977-03-22 | Semi-insulating gallium arsenide single crystal |
GB12929/77A GB1540211A (en) | 1976-03-29 | 1977-03-28 | High resistivity gallium arsenide single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3481176A JPS5946918B2 (en) | 1976-03-29 | 1976-03-29 | Semi-insulating gallium arsenide single crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52117299A true JPS52117299A (en) | 1977-10-01 |
JPS5946918B2 JPS5946918B2 (en) | 1984-11-15 |
Family
ID=12424586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3481176A Expired JPS5946918B2 (en) | 1976-03-29 | 1976-03-29 | Semi-insulating gallium arsenide single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5946918B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0252821U (en) * | 1988-10-12 | 1990-04-17 |
-
1976
- 1976-03-29 JP JP3481176A patent/JPS5946918B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5946918B2 (en) | 1984-11-15 |
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