JPS52115496A - Process and apparatus for reciprocatingly working with rockable motion - Google Patents
Process and apparatus for reciprocatingly working with rockable motionInfo
- Publication number
- JPS52115496A JPS52115496A JP3215876A JP3215876A JPS52115496A JP S52115496 A JPS52115496 A JP S52115496A JP 3215876 A JP3215876 A JP 3215876A JP 3215876 A JP3215876 A JP 3215876A JP S52115496 A JPS52115496 A JP S52115496A
- Authority
- JP
- Japan
- Prior art keywords
- reciprocatingly
- working
- work
- motion
- rockable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3215876A JPS52115496A (en) | 1976-03-24 | 1976-03-24 | Process and apparatus for reciprocatingly working with rockable motion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3215876A JPS52115496A (en) | 1976-03-24 | 1976-03-24 | Process and apparatus for reciprocatingly working with rockable motion |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52115496A true JPS52115496A (en) | 1977-09-28 |
JPS5442718B2 JPS5442718B2 (enrdf_load_html_response) | 1979-12-15 |
Family
ID=12351110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3215876A Granted JPS52115496A (en) | 1976-03-24 | 1976-03-24 | Process and apparatus for reciprocatingly working with rockable motion |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52115496A (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001353654A (ja) * | 2000-04-12 | 2001-12-25 | Muutech:Kk | ワークの研磨装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5210069A (en) * | 1975-07-14 | 1977-01-26 | Seiko Epson Corp | Automatic apparatus for cleaning and drying wafer |
-
1976
- 1976-03-24 JP JP3215876A patent/JPS52115496A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5210069A (en) * | 1975-07-14 | 1977-01-26 | Seiko Epson Corp | Automatic apparatus for cleaning and drying wafer |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001353654A (ja) * | 2000-04-12 | 2001-12-25 | Muutech:Kk | ワークの研磨装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5442718B2 (enrdf_load_html_response) | 1979-12-15 |
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