JPS52115261A - Fine particle monitor - Google Patents

Fine particle monitor

Info

Publication number
JPS52115261A
JPS52115261A JP3128476A JP3128476A JPS52115261A JP S52115261 A JPS52115261 A JP S52115261A JP 3128476 A JP3128476 A JP 3128476A JP 3128476 A JP3128476 A JP 3128476A JP S52115261 A JPS52115261 A JP S52115261A
Authority
JP
Japan
Prior art keywords
fine particle
particle monitor
particle
monitor
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3128476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5632575B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kiyoshi Narato
Keizo Otsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3128476A priority Critical patent/JPS52115261A/ja
Publication of JPS52115261A publication Critical patent/JPS52115261A/ja
Publication of JPS5632575B2 publication Critical patent/JPS5632575B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP3128476A 1976-03-24 1976-03-24 Fine particle monitor Granted JPS52115261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3128476A JPS52115261A (en) 1976-03-24 1976-03-24 Fine particle monitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3128476A JPS52115261A (en) 1976-03-24 1976-03-24 Fine particle monitor

Publications (2)

Publication Number Publication Date
JPS52115261A true JPS52115261A (en) 1977-09-27
JPS5632575B2 JPS5632575B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-07-29

Family

ID=12327005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3128476A Granted JPS52115261A (en) 1976-03-24 1976-03-24 Fine particle monitor

Country Status (1)

Country Link
JP (1) JPS52115261A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239588A1 (ja) * 2018-06-15 2019-12-19 日本碍子株式会社 微粒子数検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239588A1 (ja) * 2018-06-15 2019-12-19 日本碍子株式会社 微粒子数検出器

Also Published As

Publication number Publication date
JPS5632575B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-07-29

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