JPS52113335A - Vacuum discharging method and apparatus - Google Patents

Vacuum discharging method and apparatus

Info

Publication number
JPS52113335A
JPS52113335A JP3038276A JP3038276A JPS52113335A JP S52113335 A JPS52113335 A JP S52113335A JP 3038276 A JP3038276 A JP 3038276A JP 3038276 A JP3038276 A JP 3038276A JP S52113335 A JPS52113335 A JP S52113335A
Authority
JP
Japan
Prior art keywords
discharging method
vacuum discharging
vacuum
discharging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3038276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5437046B2 (ko
Inventor
Akio Tanaka
Akira Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Ltd
Original Assignee
Kawasaki Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Industries Ltd filed Critical Kawasaki Heavy Industries Ltd
Priority to JP3038276A priority Critical patent/JPS52113335A/ja
Publication of JPS52113335A publication Critical patent/JPS52113335A/ja
Publication of JPS5437046B2 publication Critical patent/JPS5437046B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP3038276A 1976-03-19 1976-03-19 Vacuum discharging method and apparatus Granted JPS52113335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3038276A JPS52113335A (en) 1976-03-19 1976-03-19 Vacuum discharging method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3038276A JPS52113335A (en) 1976-03-19 1976-03-19 Vacuum discharging method and apparatus

Publications (2)

Publication Number Publication Date
JPS52113335A true JPS52113335A (en) 1977-09-22
JPS5437046B2 JPS5437046B2 (ko) 1979-11-13

Family

ID=12302325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3038276A Granted JPS52113335A (en) 1976-03-19 1976-03-19 Vacuum discharging method and apparatus

Country Status (1)

Country Link
JP (1) JPS52113335A (ko)

Also Published As

Publication number Publication date
JPS5437046B2 (ko) 1979-11-13

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