JPS5437046B2 - - Google Patents
Info
- Publication number
- JPS5437046B2 JPS5437046B2 JP3038276A JP3038276A JPS5437046B2 JP S5437046 B2 JPS5437046 B2 JP S5437046B2 JP 3038276 A JP3038276 A JP 3038276A JP 3038276 A JP3038276 A JP 3038276A JP S5437046 B2 JPS5437046 B2 JP S5437046B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Discharge Heating (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3038276A JPS52113335A (en) | 1976-03-19 | 1976-03-19 | Vacuum discharging method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3038276A JPS52113335A (en) | 1976-03-19 | 1976-03-19 | Vacuum discharging method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52113335A JPS52113335A (en) | 1977-09-22 |
| JPS5437046B2 true JPS5437046B2 (ko) | 1979-11-13 |
Family
ID=12302325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3038276A Granted JPS52113335A (en) | 1976-03-19 | 1976-03-19 | Vacuum discharging method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52113335A (ko) |
-
1976
- 1976-03-19 JP JP3038276A patent/JPS52113335A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52113335A (en) | 1977-09-22 |