JPS52108348A - Method of detecting terminal point of ion milling time - Google Patents

Method of detecting terminal point of ion milling time

Info

Publication number
JPS52108348A
JPS52108348A JP2506276A JP2506276A JPS52108348A JP S52108348 A JPS52108348 A JP S52108348A JP 2506276 A JP2506276 A JP 2506276A JP 2506276 A JP2506276 A JP 2506276A JP S52108348 A JPS52108348 A JP S52108348A
Authority
JP
Japan
Prior art keywords
terminal point
ion milling
milling time
detecting terminal
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2506276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5429410B2 (enrdf_load_stackoverflow
Inventor
Toshio Oku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP2506276A priority Critical patent/JPS52108348A/ja
Publication of JPS52108348A publication Critical patent/JPS52108348A/ja
Publication of JPS5429410B2 publication Critical patent/JPS5429410B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP2506276A 1976-03-10 1976-03-10 Method of detecting terminal point of ion milling time Granted JPS52108348A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2506276A JPS52108348A (en) 1976-03-10 1976-03-10 Method of detecting terminal point of ion milling time

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2506276A JPS52108348A (en) 1976-03-10 1976-03-10 Method of detecting terminal point of ion milling time

Publications (2)

Publication Number Publication Date
JPS52108348A true JPS52108348A (en) 1977-09-10
JPS5429410B2 JPS5429410B2 (enrdf_load_stackoverflow) 1979-09-22

Family

ID=12155421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2506276A Granted JPS52108348A (en) 1976-03-10 1976-03-10 Method of detecting terminal point of ion milling time

Country Status (1)

Country Link
JP (1) JPS52108348A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5429410B2 (enrdf_load_stackoverflow) 1979-09-22

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