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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP2323176ApriorityCriticalpatent/JPS52106668A/en
Publication of JPS52106668ApublicationCriticalpatent/JPS52106668A/en
PURPOSE: To provide a scanning micro-probe making feasible understanding diameter of a probe by direct view and possible to read out its astigmation and compensation by displaying a bright line of a circular pattern corresponding to the diameter of the proble on a brown tube.