JPS52106668A - Sanning micro-probe - Google Patents

Sanning micro-probe

Info

Publication number
JPS52106668A
JPS52106668A JP2323176A JP2323176A JPS52106668A JP S52106668 A JPS52106668 A JP S52106668A JP 2323176 A JP2323176 A JP 2323176A JP 2323176 A JP2323176 A JP 2323176A JP S52106668 A JPS52106668 A JP S52106668A
Authority
JP
Japan
Prior art keywords
probe
micro
sanning
diameter
astigmation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2323176A
Other languages
Japanese (ja)
Inventor
Mitsuhiko Yamada
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2323176A priority Critical patent/JPS52106668A/en
Publication of JPS52106668A publication Critical patent/JPS52106668A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a scanning micro-probe making feasible understanding diameter of a probe by direct view and possible to read out its astigmation and compensation by displaying a bright line of a circular pattern corresponding to the diameter of the proble on a brown tube.
COPYRIGHT: (C)1977,JPO&Japio
JP2323176A 1976-03-05 1976-03-05 Sanning micro-probe Pending JPS52106668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2323176A JPS52106668A (en) 1976-03-05 1976-03-05 Sanning micro-probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2323176A JPS52106668A (en) 1976-03-05 1976-03-05 Sanning micro-probe

Publications (1)

Publication Number Publication Date
JPS52106668A true JPS52106668A (en) 1977-09-07

Family

ID=12104836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2323176A Pending JPS52106668A (en) 1976-03-05 1976-03-05 Sanning micro-probe

Country Status (1)

Country Link
JP (1) JPS52106668A (en)

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