JPS52100235A - Stripping solution of photosolubilizable light sensitive resin - Google Patents
Stripping solution of photosolubilizable light sensitive resinInfo
- Publication number
- JPS52100235A JPS52100235A JP1738976A JP1738976A JPS52100235A JP S52100235 A JPS52100235 A JP S52100235A JP 1738976 A JP1738976 A JP 1738976A JP 1738976 A JP1738976 A JP 1738976A JP S52100235 A JPS52100235 A JP S52100235A
- Authority
- JP
- Japan
- Prior art keywords
- photosolubilizable
- light sensitive
- sensitive resin
- stripping solution
- dimethylformamide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To perfectly remove a positive type photoresist for use in forming electrodes of surface wave filter elements and the like, even if its surface becomes a passive state, by mixing acetone and dimethylformamide at a specified ratio.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1738976A JPS52100235A (en) | 1976-02-19 | 1976-02-19 | Stripping solution of photosolubilizable light sensitive resin |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1738976A JPS52100235A (en) | 1976-02-19 | 1976-02-19 | Stripping solution of photosolubilizable light sensitive resin |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52100235A true JPS52100235A (en) | 1977-08-23 |
JPS576101B2 JPS576101B2 (en) | 1982-02-03 |
Family
ID=11942631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1738976A Granted JPS52100235A (en) | 1976-02-19 | 1976-02-19 | Stripping solution of photosolubilizable light sensitive resin |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52100235A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005055886A (en) * | 2003-08-01 | 2005-03-03 | Dongjin Semichem Co Ltd | Cleaning agent composition for removing photosensitive resin composition |
-
1976
- 1976-02-19 JP JP1738976A patent/JPS52100235A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005055886A (en) * | 2003-08-01 | 2005-03-03 | Dongjin Semichem Co Ltd | Cleaning agent composition for removing photosensitive resin composition |
JP4494897B2 (en) * | 2003-08-01 | 2010-06-30 | 東進セミケム株式会社 | Cleaning composition for removing photosensitive resin composition |
Also Published As
Publication number | Publication date |
---|---|
JPS576101B2 (en) | 1982-02-03 |
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