JPS5199744U - - Google Patents
Info
- Publication number
- JPS5199744U JPS5199744U JP1766575U JP1766575U JPS5199744U JP S5199744 U JPS5199744 U JP S5199744U JP 1766575 U JP1766575 U JP 1766575U JP 1766575 U JP1766575 U JP 1766575U JP S5199744 U JPS5199744 U JP S5199744U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975017665U JPS5439475Y2 (en:Method) | 1975-02-07 | 1975-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975017665U JPS5439475Y2 (en:Method) | 1975-02-07 | 1975-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5199744U true JPS5199744U (en:Method) | 1976-08-10 |
| JPS5439475Y2 JPS5439475Y2 (en:Method) | 1979-11-21 |
Family
ID=28102218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975017665U Expired JPS5439475Y2 (en:Method) | 1975-02-07 | 1975-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5439475Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006314864A (ja) * | 2005-05-10 | 2006-11-24 | Mitsubishi Electric Corp | 排気トラップ装置 |
| JP2010016227A (ja) * | 2008-07-04 | 2010-01-21 | Mitsubishi Electric Corp | 半導体製造装置および排気トラップ装置 |
-
1975
- 1975-02-07 JP JP1975017665U patent/JPS5439475Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006314864A (ja) * | 2005-05-10 | 2006-11-24 | Mitsubishi Electric Corp | 排気トラップ装置 |
| JP2010016227A (ja) * | 2008-07-04 | 2010-01-21 | Mitsubishi Electric Corp | 半導体製造装置および排気トラップ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5439475Y2 (en:Method) | 1979-11-21 |