JPS5199744U - - Google Patents

Info

Publication number
JPS5199744U
JPS5199744U JP1766575U JP1766575U JPS5199744U JP S5199744 U JPS5199744 U JP S5199744U JP 1766575 U JP1766575 U JP 1766575U JP 1766575 U JP1766575 U JP 1766575U JP S5199744 U JPS5199744 U JP S5199744U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1766575U
Other languages
Japanese (ja)
Other versions
JPS5439475Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975017665U priority Critical patent/JPS5439475Y2/ja
Publication of JPS5199744U publication Critical patent/JPS5199744U/ja
Application granted granted Critical
Publication of JPS5439475Y2 publication Critical patent/JPS5439475Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP1975017665U 1975-02-07 1975-02-07 Expired JPS5439475Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975017665U JPS5439475Y2 (enrdf_load_html_response) 1975-02-07 1975-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975017665U JPS5439475Y2 (enrdf_load_html_response) 1975-02-07 1975-02-07

Publications (2)

Publication Number Publication Date
JPS5199744U true JPS5199744U (enrdf_load_html_response) 1976-08-10
JPS5439475Y2 JPS5439475Y2 (enrdf_load_html_response) 1979-11-21

Family

ID=28102218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975017665U Expired JPS5439475Y2 (enrdf_load_html_response) 1975-02-07 1975-02-07

Country Status (1)

Country Link
JP (1) JPS5439475Y2 (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置
JP2010016227A (ja) * 2008-07-04 2010-01-21 Mitsubishi Electric Corp 半導体製造装置および排気トラップ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置
JP2010016227A (ja) * 2008-07-04 2010-01-21 Mitsubishi Electric Corp 半導体製造装置および排気トラップ装置

Also Published As

Publication number Publication date
JPS5439475Y2 (enrdf_load_html_response) 1979-11-21

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